| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a light irradiation device, a substrate processing device and a control method for the light irradiation device, capable of suppressing decrease in substrate processing efficiency while achieving lower power consumption. <P>SOLUTION: As edge exposure processing, an edge exposure unit processes exposure of the peripheral edge portion of a substrate. The edge exposure unit includes an exposure light source of light for exposure, to expose the peripheral edge portion of the substrate. To the exposure light source, power is supplied from a lamp driver. The lamp driver is controlled by a controller. The controller sets a normal mode in an edge exposure processing period for processing edge exposure of the substrate. In the normal mode, first power PW1 is supplied to the exposure light source. The controller sets a power saving mode in a non-processing period excluding the edge exposure processing period. In the power saving mode, second power PW2 smaller than the first power PW1 is supplied to the exposure light source. <P>COPYRIGHT: (C)2013,JPO&INPIT |
