| 摘要 |
<P>PROBLEM TO BE SOLVED: To prevent protruding shape parts from collapsing when a work-piece, formed by laminating an inorganic film and a metal film, is processed. <P>SOLUTION: A liquid processing apparatus processes a work-piece W which has a body part W<SB POS="POST">i</SB>and multiple protruding shape parts W<SB POS="POST">m</SB>provided at the body part W<SB POS="POST">i</SB>and is formed by laminating an inorganic film and a metal film. The liquid processing apparatus includes: a support part 50 supporting the body part W<SB POS="POST">i</SB>of the work-piece W; a hydrophobic liquid supply mechanism 30 supplying a hydrophobic liquid to the work-piece W supported by the support part 50; and a rinse liquid supply part 22 supplying a rinse liquid to the work-piece W after the hydrophobic liquid is supplied by the hydrophobic liquid supply mechanism 30. The hydrophobic liquid supply mechanism 30 has: a first hydrophobic liquid supply part 32 supplying a first hydrophobic liquid for hydrophobizing the inorganic film to the work-piece W; and a second hydrophobic liquid supply part 37 supplying a second hydrophobic liquid for hydrophobizing a heterogeneity film to the work-piece W. <P>COPYRIGHT: (C)2013,JPO&INPIT |
