| 摘要 |
A charged particle device that can prevent an effect of a vibration and suppress relative displacement between a charged particle generator and a specimen stage without reducing a movement range of the specimen stage is achieved. The charged particle device (1) has a long cylindrical column (2) at its upper portion and a hollow specimen chamber (3) arranged under the column (2). The specimen chamber (3) is divided into a specimen chamber upper portion (3a) and a specimen chamber bottom portion (3b). A vertical vibration of the specimen chamber upper portion (3a) is larger than a horizontal vibration of the specimen chamber upper portion (3a). A horizontal vibration of the specimen chamber bottom portion (3b) is large. The column (2) has a charged particle gun and a detector. The column (1) and a specimen stage supporter (4) are held by the specimen chamber upper portion (3a), while the specimen stage supporter (4) holds the specimen stage (5). A central axis of the column (1) and a central axis of the specimen stage supporter (4) match each other or are parallel to each other. Even if an environmental sound is added to the column (2) or the specimen chamber (3), the column (2) and the specimen stage (5) are fixed to the specimen chamber upper portion (3a) and vibrate in an integrated manner. Thus, relative displacement hardly occurs between the charged particle generator and a specimen.
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