| 摘要 |
PURPOSE: A nozzle and a substrate processing apparatus having the same are provided to improve washing efficiency during a washing process by providing a liquid chemical on a substrate and to spray the liquid chemical into the same area when multiple nozzles are mounted on one support stand, thereby reducing costs and improving spatial efficiency in case of using the multiple nozzles. CONSTITUTION: A nozzle(400) includes a main body(410) having a first passage(420) through which a first liquid chemical is supplied and a second passage(430) through which a second liquid chemical is supplied inside. One of the first passage and the second passage covers the other. A first outlet(422) connected with the first passage is formed in a central area of the lower surface of the main body. The main body sprays the first liquid chemical in a mist form. The first passage functions as a passage through which the first liquid chemical is supplied. An upper area(420a) of the first passage has a wider width than a lower area(420b). The upper area of the first passage is connected with a gas inlet passage(440). A second outlet(432) connected with the second passage is formed at the edge of a lower surface of the main body. The second passage having a ring shape covers the first passage and sprays the second liquid chemical in a dropping manner. The second outlet sprays the second liquid chemical into a substrate(W) in order not to be overlapped with a substrate area in which the first liquid chemical is sprayed.
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