A method for preparing a multilayer substrate includes the step of deposing an epitaxial gamma-Al2O3 Miller index (001) layer on a Si Miller index (001) substrate.
申请公布号
US8426261(B2)
申请公布日期
2013.04.23
申请号
US20070675733
申请日期
2007.08.28
申请人
MERCKLING CLEMENT;EL-KAZZI MARIO;SAINT-GIRONS GUILLAUME;HOLLINGER GUY;STMICROELECTRONICS S.A.;CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE;ECOLE CENTRALE DE LYON
发明人
MERCKLING CLEMENT;EL-KAZZI MARIO;SAINT-GIRONS GUILLAUME;HOLLINGER GUY
