| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a spatial light modulator ensuring a high resolution by using electrowetting and capable of controlling the phase of light passing through each pixel. <P>SOLUTION: A spatial light modulator 28 for modulating illumination light IL incident to the array surface includes a cell 34 having a barrier 33a in the Z direction traversing the array surface, lower electrodes 60A, 60B and upper electrodes 64A, 64B arranged in the Z direction in the cell 34, and a liquid Lq held between the electrodes 60A, 60B and 64A, 64B in the cell 34. The phase of the illumination light IL reflected in the cell 34 is controlled by controlling the position in the Z direction of the liquid Lq in the cell 34 by a voltage applied to the electrodes 60A, 60B and 64A, 64B. <P>COPYRIGHT: (C)2013,JPO&INPIT |
