| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a polishing cloth of high performance with low surface roughness and low dynamic friction factor that cannot be achieved by a polishing cloth composed of conventional ultrafine fibers. <P>SOLUTION: The polishing cloth has a fiber structure containing the ultrafine fibers of an average single fiber diameter of 0.05-5.0 μm, the surface roughness of the fiber structure being 1-20 μm and the dynamic friction factor being 0.1-1.0. At least at a part of the fiber structure, 10-3,000 ppm of silicon compound is present. The polishing cloth has piloerection composed of the ultrafine fibers at least on one side surface of the fiber structure. <P>COPYRIGHT: (C)2013,JPO&INPIT |
