| 摘要 |
<P>PROBLEM TO BE SOLVED: To inhibit the occurrence of a problem that a substrate W is damaged when the substrate W is peeled from an adhesive sheet 5. <P>SOLUTION: A gas (nitrogen gas) is injected between an adhesive sheet 5 and a substrate W thereby peeling the substrate W from the adhesive sheet 5. Thus, the substrate W is peeled from the adhesive sheet 5 with a force of the injected gas (nitrogen gas), which is relatively dispersed and acts on the substrate W, without causing a large force to locally act on the substrate W. As a result, the structure inhibits the occurrence of a problem that the substrate W is damaged when the substrate W is peeled from the adhesive sheet 5. <P>COPYRIGHT: (C)2013,JPO&INPIT |
