COATING APPARATUS AND COATING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a coating apparatus that controls the film pressure and shape thereof with high accuracy by accurately adjusting how materials are supplied.

SOLUTION: The coating apparatus according to an embodiment includes: a nozzle that discharges material to coat a coating object; a storage section for storing the material supplied to the nozzle; a flow path that links the storage section and nozzle; and a discharge valve including a discharging diaphragm valve that switches the opening and closing of the flow path and a suck back section which is connected to the flow path to adjust the flow amount of the material in the flow path and which adjusts the suck back amount.

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