DROPLET DISCHARGE APPARATUS AND DROPLET DISCHARGE METHOD

摘要

PROBLEM TO BE SOLVED: To provide a technique to satisfactorily correct discharge timing even when points on an object for inspecting variations of separated distances between a discharge part and the object are few.

SOLUTION: In the droplet discharge apparatus, the droplet discharged from the discharge part is landed on the object by relatively moving the object to the discharge part in which a plurality of discharge ports discharging the droplets are formed by means of a moving mechanism. The droplet discharge apparatus is provided with: a discharge control part for controlling the discharge of the droplet from the discharge port by outputting a discharge signal to the discharge part; an inspection part for inspecting the variations of the separated distances between the discharge part and the object corresponding to the relative movement of the object about a plurality of the points on the object; an interpolation part for interpolating the variations in the points except for the plurality of the points in the region on the object by the calculation based on the inspected result in the inspection part; and a correction part correcting the discharge timing of the droplet from the discharge port on the basis of information about the variations acquired by the interpolation part.

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