| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce the number of galvano-motors to be mounted, make a turntable unnecessary to reduce the size and cost of a device. <P>SOLUTION: A laser scribing device includes a plurality of machining shafts arranged linearly matching the gaps for grooving. When machining shafts are moved relative to a workpiece having a thin film formed thereon in the direction perpendicular to the direction in which the shafts are arranged to fabricate a plurality of grooves simultaneously to the thin film, a scribing process includes steps to be described below. When the workpiece is loaded while being inclined relative to the direction of processing from a normal position, the inclination from the normal position of the workpiece is measured (S2), a correction magnification of the distance between shafts to be increased is calculated based on the measured inclination (S3), a corrected distance between the shafts is acquired by multiplying the calculated correction magnification to the distance between adjacent processing shafts (S5), and the distance between adjacent processing shafts is moved to the acquired corrected distance between the shafts (S6), so that the distance between the adjacent grooves which reduces due to the inclination is corrected by increasing the distance between the adjacent machining shafts. <P>COPYRIGHT: (C)2013,JPO&INPIT |
