发明名称 INJECTION UNIT
摘要 PURPOSE: An injection unit and a substrate processing apparatus having the same are provided to improve a cleaning effect by combining a support unit with a first and a second nozzle which spray a chemical solution to different directions. CONSTITUTION: A first nozzle member(390) includes a first nozzle(392) for spraying a first chemical solution and a support unit(396) for supporting the first nozzle. A second nozzle member(400) is combined with the support unit to spray a second chemical solution. The second nozzle member includes a second nozzle(430) for spraying the second chemical solution and a combination member for connecting the second nozzle to the support unit. The combination member has a first body(410) and a second body(420). The first body is screw-coupled to the support unit through a connection hole(412).
申请公布号 KR20130039276(A) 申请公布日期 2013.04.19
申请号 KR20110103825 申请日期 2011.10.11
申请人 SEMES CO., LTD. 发明人 NOH, HWAN IK;OH, SE HOON;YU, JIN TACK
分类号 H01L21/302 主分类号 H01L21/302
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