| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a system and a method capable of preventing or reducing the effect of unexpected or unintended trouble or limitation resulting from contamination of a fuel deposited on the inner surface of a nozzle. <P>SOLUTION: The radiation source according to the first embodiment comprises a reservoir configured to hold the volume of a fuel, a nozzle in fluid-connection with the reservoir configured to guide the flow of the fuel along the track toward a plasma formation arrangement, a laser configured to generate radiation-generating plasma during use by guiding the laser radiation to the flow at the plasma formation arrangement, and a contamination filter assembly disposed in the fuel passage of the radiation source in the upstream of a nozzle outlet. The filter medium of the contamination filter assembly is held at an appropriate position therein by a clamp force provided by one or more object surrounding the filter medium at least partially. <P>COPYRIGHT: (C)2013,JPO&INPIT |
