| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for producing a quartz glass article having a flow channel which is microscopic and hollow, the method requiring no improvement in profile irregularity which is necessary in a conventional bonding step, omitting equipment for bonding, and achieving a reduction in cost. <P>SOLUTION: The production method includes the following steps: a step in which a convex and microscopic flow channel pattern part 12 is formed on the upper face of a flat silica substrate 10, the pattern part comprising a combustible and removable substance; a step in which a powdery silica-containing green layer 14 is provided so that it may cover the microscopic flow channel pattern part to form a silica complex 16 comprising the silica substrate and the powdery silica-containing green layer; a step in which the silica complex is kept under heating in an acidic atmosphere to burn and remove the microscopic flow channel pattern part, and consequently a flow channel 12A which is microscopic and hollow is formed, and then a silica complex 16A having the flow channel, which is microscopic and hollow, is formed; and a step in which the silica complexes having the flow channels, which are microscopic and hollow, are heated to a high temperature to make them sintered, transparent and fused together to be one united body, and consequently the quartz glass article 20 having the flow channels which are microscopic and hollow are formed. <P>COPYRIGHT: (C)2013,JPO&INPIT |
