发明名称 NORMALLY-OFF III-NITRIDE METAL-2DEG TUNNEL JUNCTION FIELD-EFFECT TRANSISTORS
摘要 Structures, devices and methods are provided for creating heterojunction AlGaN/GaN metal two-dimensional electron gas (2DEG) tunnel-junction field-effect transistors (TJ-FET). In one aspect, metal-2DEG Schottky tunnel junctions can be employed in group III-Nitride field-effect devices that enable normally-off operation, large breakdown voltage, low leakage current, and high on/off current ratio. As a further advantage, AlGaN/GaN metal-2DEG TJ-FETs are disclosed that can be fabricated in a lateral configuration and/or a vertical configuration. Further non-limiting embodiments are provided that illustrate the advantages and flexibility of the disclosed structures.
申请公布号 US2013092958(A1) 申请公布日期 2013.04.18
申请号 US201013699296 申请日期 2010.09.08
申请人 CHEN JING;YUAN LI;CHEN HONGWEI;ZHOU CHUNHUA;THE HONG KONG UNIVERSITY OF SCIENCE AND TECHNOLOGY 发明人 CHEN JING;YUAN LI;CHEN HONGWEI;ZHOU CHUNHUA
分类号 H01L29/778;H01L29/16;H01L29/20 主分类号 H01L29/778
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