| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a chemical treatment method capable of suppressing agglutination of dissolution products, and a chemical treatment device. <P>SOLUTION: According to an embodiment, a chemical treatment method comprises the steps of: supplying a chemical onto a substrate on which a processed film is formed; sucking a mixed liquid of the chemical and a first rinse liquid on the substrate and measuring the sizes and number of particles generated when the processed film dissolves in the chemical and included in the mixed liquid while supplying the first rinse liquid onto the substrate onto which the chemical was supplied; and stopping supply of the first rinse liquid and supplying a second rinse liquid onto the substrate according to the timing based on the measurement result. <P>COPYRIGHT: (C)2013,JPO&INPIT |
