METHODS FOR FABRICATING THREE-DIMENSIONAL NANO-SCALE STRUCTURES AND DEVICES

摘要

A method of fabricating a 3 dimensional structure, includes: forming a stack (12) of at least 2 layers of photo resist material having different photo resist sensitivities upon a substrate (14); exposing the stack to beams (22) of electromagnetic radiation or charged particles of different dosages to achieve selective solubility along a height of the stack; and dissolving soluble portions of the stack with a solvent to produce a 3 dimensional structure (24) of desired geometry.