SHAPE-MEASURING DEVICE, SYSTEM FOR MANUFACTURING STRUCTURES, SHAPE-MEASURING METHOD, METHOD FOR MANUFACTURING STRUCTURES, SHAPE-MEASURING PROGRAM

摘要

The aim of the present invention is to measure shapes efficiently. A shape-measuring device is provided with: an imaging part for taking an image of an object to be measured; an irradiation part for irradiating measurement light from a projection direction which differs from the imaging direction of the imaging part, to form a prescribed light intensity distribution on the object to be measured; a reference-light generation part for generating reference light irradiated on the object to be measured; and a detection part for detecting the shape measurement coverage of the object to be measured, on the basis of the captured image taken by the imaging part when the reference light was projected onto the object to be measured.