| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing gallium nitride powder capable of producing gallium nitride powder suitable for use as a raw material in synthesizing bulk crystals of gallium nitride by the ammonothermal method with a low cost and highly productivity by using a vapor-phase method. <P>SOLUTION: Gallium chloride is produced by reacting hydrogen chloride with gallium powder at a temperature of 800 to 1,000°C, and the gallium nitride is synthesized by reacting the obtained gallium chloride with ammonia at a temperature of 800 to 1,200°C. By controlling the temperature of the gas atmosphere containing the obtained gallium nitride to 185°C or more and 337.5°C or less the gallium nitride powder not containing the ammonium chloride of a reaction by-product is separately recovered. <P>COPYRIGHT: (C)2013,JPO&INPIT |
