发明名称 LASER CRYSTALLIZATION APPARATUS AND LASER CRYSTALLIZATION METHOD USING THE SAME
摘要 A laser crystallization device is provided, which includes a vibration device vibrating a laser beam along its long axis, wherein a vibration frequency at which the laser beam vibrates is satisfied by Equation 1 below. F<(P*f)/ (2*W) Equation 1 where F is the mirror vibration frequency, W is the laser beam width, P is the laser scan pitch, and f is the laser pulse frequency.
申请公布号 US2013094534(A1) 申请公布日期 2013.04.18
申请号 US201213433094 申请日期 2012.03.28
申请人 OKUMURA HIROSHI 发明人 OKUMURA HIROSHI
分类号 H01S3/08 主分类号 H01S3/08
代理机构 代理人
主权项
地址