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发明名称
摘要
申请公布号
BE684752(A)
申请公布日期
1967.01.30
申请号
BED684752
申请日期
1966.07.28
申请人
发明人
分类号
H01L21/00;H01L21/22;H01L29/00;H01L29/73
主分类号
H01L21/00
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代理人
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