发明名称
摘要 The accelerometer has a base ( 2 ), an outer planar ring-like support frame ( 17 ) fixedly bonded to the base ( 2 ), and an inner planar ring-like support frame ( 18 ) flexibly suspended within the outer frame ( 17 ) by mounts ( 19 ) connecting the inner frame ( 18 ) to the outer frame ( 17 ) so that the inner frame ( 18 ) is spaced from the base ( 2 ), co-planar with the outer support fram ( 17 ) so as to provide flexible suspension for the inner support frame ( 18 ) reducing compressive and/or tensile forces on mounting legs ( 4 ) flexibly mounting a proof mass ( 3 ) in the inner support frame ( 18 ).
申请公布号 JP5184880(B2) 申请公布日期 2013.04.17
申请号 JP20070500281 申请日期 2005.02.22
申请人 发明人
分类号 G01P15/13;G01P1/00;G01P15/08;G01P15/125;H01L29/84 主分类号 G01P15/13
代理机构 代理人
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