| 摘要 |
PURPOSE: A device for preventing a chip from penetrating inside a chuck installed on an automatic shelf is provided to prevent a chip from penetrating inside a chuck when processing an object and to automate the continuous work of processing objects by shortening the process delay due to remaining chips. CONSTITUTION: A device for preventing a chip from penetrating inside a chuck installed on an automatic shelf comprises a sealing cover(210), a blocking member(220), and a fixing member(230). The sealing cover is inserted into a hole formed at the center of the chuck or is adhered on the outer circumference surface of the hole. The blocking member is installed on the outer circumference of the sealing cover at a constant interval. The fixing member fixes the sealing member and the blocking member.
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