| 摘要 |
A flexible piezoelectric tactile sensor having a piezoelectric thin film, a first flexible substrate, a second flexible substrate, and at least one elastic body is revealed. The piezoelectric thin film includes an upper surface and a lower surface while the first flexible substrate is disposed on the upper surface of the piezoelectric thin film. The first flexible substrate consists of a first surface facing the upper surface, a second surface opposite to the first surface and a plurality of first electrodes formed on the first surface. The second flexible substrate, including a third surface facing the lower surface and a plurality of second electrodes formed on the third surface, is arranged on the lower surface of the piezoelectric thin film. Both the first electrodes and the second electrode are electrically connected with the piezoelectric thin film. The elastic body is set on the second surface, corresponding to the first electrodes. |
