COMPOSITE CHARGED PARTICLE BEAM DEVICE

摘要

PROBLEM TO BE SOLVED: To display an FIB image and an SEM image allowing an operator to easily grasp a positional relation of samples in observation in a device in which an FIB lens barrel and an SEM lens barrel are configured perpendicular to each other.

SOLUTION: A composite charged particle beam device includes: an FIB lens barrel 1; an SEM lens barrel 2 arranged approximately perpendicular to the FIB lens barrel 1; a sample stage 3 on which a sample 4 is placed; a secondary electron detector 5 which detects secondary particles generated from the sample 4; an observation image forming part 15 which forms an FIB image and an SEM image from a detection signal; and a display part 9 which displays the FIB image and the SEM image where right and left directions of the sample in the FIB image and the right and left directions of the sample in the SEM image are same as each other.

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