| 摘要 |
<p>The purpose of the present invention is to provide an ozone generation unit with less nitrogen added, whereby a greater amount of ozone gas can be outputted. In the present invention, the ozone generation unit (7) with less nitrogen added is configured to be a single-unit package unit by consolidating a plurality of functional means, including an ozone generator (1) with less nitrogen added that has been cooled to a low temperature, an ozone power source (2), an MFC (3), an APC (4), a piping (31I) for adiabatic cooling water input, and a piping (31O) for adiabatic cooling water output. In the ozone generator (1) with less nitrogen added, an adiabatic layer (8) constituted of an adiabatic material such as an insulator is formed covering substantially the entire surface of an ozone generator box (1x). In a cooling water system (30), the temperature of cooling water (33) supplied to the ozone generator (1) with less nitrogen added via the piping (31I) for adiabatic cooling water input is set to 5°C or lower, and the ozone generator (1) with less nitrogen added is itself given a low-temperature configuration.</p> |
