| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a mist recovery device, which can make a clean working environment by recovering mist at a point close to a substrate and preventing from spreading over on the whole device, when using a high pressure water jetting nozzle in the process of cleaning a large size substrate. <P>SOLUTION: At a high pressure water nozzle 2, original high pressure jetting fine particles 3 are jetted at high speed, and a large amount of mist 4 is dispersedly generated by winding in of surrounding air flow at the outer periphery of fine particles. Using the expanding phenomena, mist 4 with low density leads itself to a ring shaped space from a step-shaped opening part formed of an inner peripheral cup 5 and an outer peripheral cup 6 of a cup shape and is discharged to the outside with a mist suction pipe 6b. The cleaning water 3a flowing on the substrate which requires high energy for suction releases itself from the clearance So between the outer peripheral cup 6 and the substrate 7. <P>COPYRIGHT: (C)2013,JPO&INPIT |
