CONTROL MODULE FOR AN ION IMPLANTER IN THE PLASMA IMMERSION MODE

摘要

The present invention relates to a control module for an ion implanter, comprising a power supply, said power supply including: an electrical generator (HT), the positive pole of which is connected to the ground; a first switch (SW1), the first pole of which is connected to the negative pole of the generator (HT) and the second pole of which is connected to the output terminal (S) of said power supply; and a second switch (SW2), the first pole of which is connected to the output terminal (S) and the second pole of which is connected to the neutral terminal (N). In addition, said control module includes a circuit (AMP) for measuring the current that flows between the second pole of the second switch (SW2) and the neutral terminal (N). The invention also relates to an ion implanter provided with said control module.