发明名称 |
COATING METHOD AND COATING APPARATUS |
摘要 |
A coating method includes a step of forming a film of a coating solution having a larger thickness in a central region of a substrate than in an edge region of the substrate by discharging droplets of the coating solution from a plurality of nozzles formed on an inkjet head to the substrate, and a step of moving the coating solution in the film from the central region toward the edge region of the substrate by rotating the substrate. This reduces a difference in thickness of the film between the central region and the edge region of the substrate, thereby to make the film thickness substantially uniform. At the same time, the movement of the coating solution in the film can make the surface of the film smoother. |
申请公布号 |
US2013089664(A1) |
申请公布日期 |
2013.04.11 |
申请号 |
US201213633726 |
申请日期 |
2012.10.02 |
申请人 |
INAGAKI YUKIHIKO;GOTO TOMOHIRO |
发明人 |
INAGAKI YUKIHIKO;GOTO TOMOHIRO |
分类号 |
B05D3/12;B05C9/12;B05C13/00;B05D1/26 |
主分类号 |
B05D3/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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