Piezoelectric pump

摘要

A piezoelectric pump comprises a pump body with a pump chamber and a piezoelectric element supported by the pump body so as to close the pump chamber and bent by voltage application so as to change the volume of the pump chamber. The piezoelectric element is of the bimorph type in which a plurality of piezoelectric layers is laminated. A diaphragm for separating the piezoelectric element from the pump chamber is bonded to a surface of the piezoelectric element adjacent to the pump chamber in face-to-face relationship. An inversion plane of the piezoelectric element alone, expansion/contraction directions of the piezoelectric element being inverted at the inversion plane, matches a neutral plane of the piezoelectric element and the diaphragm bonded to each other.