发明名称 |
A METHOD FOR MEASURING BULK IMPURITIES OF SEMICONDUCTOR MATERIALS USING EDGE - ON PHOTOLUMINESCENCE |
摘要 |
<p>Provided are photoluminescence spectroscopy systems and methods for identifying and quantifying impurities in a semiconductor sample. In some embodiments, the systems and methods comprise a defocused collimated laser beam illuminating a first sample surface, and collection by a collection lens of photoluminescence from a sample edge at the intersection of the first surface with a substantially orthogonal second surface, wherein the first sample surface is oriented from about 0° to 90° with respect to a position parallel to the collection lens.</p> |
申请公布号 |
EP2577274(A1) |
申请公布日期 |
2013.04.10 |
申请号 |
EP20110724924 |
申请日期 |
2011.06.03 |
申请人 |
HEMLOCK SEMICONDUCTOR CORPORATION |
发明人 |
KRESZOWSKI, DOUG;HADD, JOHN, W. |
分类号 |
G01N21/64;G01N21/94;G01N21/95 |
主分类号 |
G01N21/64 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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