发明名称 Determining doping type and level in semiconducting nanostructures
摘要 Systems and methods for determining doping type and level in semiconducting nanostructures include generating light from a laser source, directing the light on the device via an extended microscope, collecting electrons emitted from the device in an electron analyzer and calculating the doping type and level of the device.
申请公布号 US8415620(B2) 申请公布日期 2013.04.09
申请号 US20100685129 申请日期 2010.01.11
申请人 HAIGHT RICHARD A.;INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 HAIGHT RICHARD A.
分类号 H01J47/00 主分类号 H01J47/00
代理机构 代理人
主权项
地址