| 摘要 |
PURPOSE: A gate valve of semiconductor production equipment is provided to perform continuous task by using a gate plate for maintenance and repair. CONSTITUTION: A valve body(1) is positioned in the upper part of a driving unit(3). The valve body has a rectangular box shape. A first gate(1a) and a second gate are formed at both sides of the valve body. A cover(1c) is combined with the upper part of the valve body by using a bolt. A valve plate assembly selectively opens and closes the first gate or the second gate of the valve body. A driving unit moves the valve plate assembly to the upper, the lower part or the inner part of the valve body. |
