CEILING PLATE FOR MOCVD DEVICE AND MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A method for manufacturing a ceiling plate for an LED growing apparatus is provided to minimize the generation of a stress by using a SiC coating layer having the thickness of 1μm or less and to prevent the warpage of a graphite base plate. CONSTITUTION: A base plate(10) has a disc shape and is made of graphite. A buffer layer(20) is positioned on the base plate. A SiC or a SiOC coating layer(30) is coated on the buffer layer. The buffer layer has a mixture of graphite and SiC. The thickness of the SiC or the SiOC coating layer is 1μm or less.