发明名称 |
METHOD FOR MANUFACTURING CONTACT PROBE |
摘要 |
<p>A method for manufacturing a contact probe (10) is provided with the following steps: a lithography step for obtaining a resin mold by forming, in a resist formed on a conductive substrate, the pattern of a contact probe (10), the pattern of a frame-shaped tie bar (20) surrounding the periphery thereof, and the pattern of a connection portion (30) connecting both the patterns by lithography; an electroforming step for forming a layer produced from a metal material in the resin mold by electroforming to form a metal structure (1) in which the contact probe (10) and the tie bar (20) are integrated by the connection portion (30); a removal step for removing the resin mold and the conductive substrate; a plating step for forming a plated layer on the surface of the metal structure (1) by electroplating after the removal step; and a separation step for separating the contact probe (10) from the metal structure (1) after the plating step. Consequently, the method for manufacturing the contact probe (10), by which the plating layer having a uniform thickness can be easily formed on the surface, can be provided.</p> |
申请公布号 |
WO2013046985(A1) |
申请公布日期 |
2013.04.04 |
申请号 |
WO2012JP70823 |
申请日期 |
2012.08.16 |
申请人 |
SUMITOMO ELECTRIC INDUSTRIES, LTD.;CHIBA, YUKIFUMI;NITTA, KOJI;TOKUDA, TAKESHI |
发明人 |
CHIBA, YUKIFUMI;NITTA, KOJI;TOKUDA, TAKESHI |
分类号 |
G01R1/067 |
主分类号 |
G01R1/067 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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