发明名称 METHOD AND APPARATUS FOR ESTIMATING THE EFFICIENCY OF A SOLAR CELL
摘要 <p>A method for estimating the efficiency of a solar cell to be manufactured from a wafer is disclosed, wherein the efficiency estimate is obtained from a density of crystallite boundaries on a surface of the wafer. In embodiments the density of crystallite boundaries is obtained from a digital image of the surface of the wafer, from which first a filtered image, and then a binary image is generated. The binary image is evaluated to obtain the density of crystallite boundaries. Alternatively, the efficiency estimate is obtained from the sizes of crystallites on the surface of the wafer. An apparatus for obtaining the efficiency estimate is also disclosed.</p>
申请公布号 WO2013017993(A9) 申请公布日期 2013.04.04
申请号 WO2012IB53776 申请日期 2012.07.25
申请人 KLA-TENCOR CORPORATION;DE GREEVE, JOHAN;VAN ROSSEN, KRISTIAAN 发明人 DE GREEVE, JOHAN;VAN ROSSEN, KRISTIAAN
分类号 H01L21/66;H01L31/042;H01L31/18 主分类号 H01L21/66
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