摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a substrate with a built-in capacitor capable of simplifying a step of mounting a capacitor element on an insulating base material. <P>SOLUTION: A manufacturing method of a substrate with a built-in capacitor comprises: an element sheet manufacturing step; a sticking step; an etching step; and a lamination step. In the element sheet manufacturing step, a dielectric layer 13 is formed on a prescribed region 54 which serves as a first electrode layer of a capacitor element in a metal foil 50 using the metal foil 50 and then manufactures an element sheet 6 provided with an element part 5 which serves as the capacitor element by forming a metal layer 53 which serves as a second electrode layer of the capacitor element on the dielectric layer 13. In the sticking step, an element sheet 6 is stuck onto an insulating base material 20. In the etching step, the prescribed region 54 is left on the insulating base material 20 by etching the metal foil 50 and forms a capacitor element composed of the element part 5 provided in the element sheet 6. In the lamination step, another insulating base material 20 is laminated on the insulating base material 20. <P>COPYRIGHT: (C)2013,JPO&INPIT |