| 发明名称 |
MICROBOLOMETER DETECTOR LAYER |
| 摘要 |
A microbolometer is disclosed, including a bottom dielectric of a bridge structure; a detector layer disposed above the bottom dielectric, the detector layer comprised of a metal-doped vanadium pentaoxide material; and a top dielectric disposed above the detector layer.
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| 申请公布号 |
US2013082178(A1) |
申请公布日期 |
2013.04.04 |
| 申请号 |
US201113252948 |
申请日期 |
2011.10.04 |
| 申请人 |
PETRAITIS YAROSLAVA;BORNFREUND RICHARD E.;DURHAM JOSEPH H.;CANNATA ROBERT F.;FLIR SYSTEMS, INC. |
发明人 |
PETRAITIS YAROSLAVA;BORNFREUND RICHARD E.;DURHAM JOSEPH H.;CANNATA ROBERT F. |
| 分类号 |
H01L27/146;H01L31/09;H01L31/18 |
主分类号 |
H01L27/146 |
| 代理机构 |
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| 主权项 |
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