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发明名称
metal line in semiconductor device and method of forming the same
摘要
申请公布号
KR101173644(B1)
申请公布日期
2012.08.13
申请号
KR20050070320
申请日期
2005.08.01
申请人
发明人
分类号
H01L21/28
主分类号
H01L21/28
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代理人
主权项
地址
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