发明名称 HIGH THROUGHPUT EPITAXIAL LIFTOFF FOR RELEASING MULTIPLE SEMICONDUCTOR DEVICE LAYERS FROM A SINGLE BASE SUBSTRATE
摘要 In one embodiment, a semiconductor structure is provided which includes a base substrate, and a multilayered stack located on the base substrate. The multilayered stack includes, from bottom to top, a first sacrificial material layer having a first thickness, a first semiconductor device layer, a second sacrificial material layer having a second thickness, and a second semiconductor device layer, wherein the first thickness is less than the second thickness.
申请公布号 US2013082356(A1) 申请公布日期 2013.04.04
申请号 US201213603927 申请日期 2012.09.05
申请人 CHENG CHENG-WEI;LI NING;SHIU KUEN-TING;INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 CHENG CHENG-WEI;LI NING;SHIU KUEN-TING
分类号 H01L29/20 主分类号 H01L29/20
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