申请人 |
ANGUS CHEMICAL COMPANY;DOW GLOBAL TECHNOLOGIES LLC;ROHM AND HAAS ELECTRONIC MATERIALS, L.L.C. |
发明人 |
DHOBLE, AVIN V.;WINKLE, MARK R.;GALLAGHER, MICHAEL K.;HO, KIM S.;ROBINSON, GLENN N.;TOMLINSON, IAN;FLEMING, DAVID D.;LIU, XIANG-QIAN;PEERA, ASGHAR A. |