发明名称 OPTICAL CONNECTION STRUCTURE AND METHOD FOR FABRICATING THE SAME
摘要 The present invention relates to an optical interconnection structure and a method for manufacturing the same. The optical interconnection structure includes a silicon substrate (10) on which at least one groove for a lens is formed to have a curvature radius on the upper surface thereof. A silica layer (30) is formed on the silicon substrate including the groove for a lens to retain a shape of the groove for a lens. As a result, the optical interconnection structure can be manufactured in great quantities by performing most of the processes using a semiconductor processing equipment and have better thermal characteristics than that of the existing PCB substrate.
申请公布号 KR101251028(B1) 申请公布日期 2013.04.04
申请号 KR20080039080 申请日期 2008.04.26
申请人 发明人
分类号 G02B6/12 主分类号 G02B6/12
代理机构 代理人
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