发明名称 |
METHODS OF MANUFACTURING HIGH-STRENGTH LARGE-AREA SPUTTERING TARGETS |
摘要 |
In various embodiments, joined sputtering targets are formed at least in part by spray deposition of the sputtering material and/or welding. |
申请公布号 |
US2013081749(A1) |
申请公布日期 |
2013.04.04 |
申请号 |
US201213628092 |
申请日期 |
2012.09.27 |
申请人 |
H. C. STARCK, INC.;H.C. STARCK, INC. |
发明人 |
VOLCHKO SCOTT JEFFREY;ZIMMERMANN STEFAN;MILLER STEVEN ALFRED |
分类号 |
B05D1/02;B32B38/00 |
主分类号 |
B05D1/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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