发明名称 Slurry Bath and Wire Sawing Device including the same
摘要 PURPOSE: A slurry bath for a wire sawing device and the wire sawing device including the same are provided to minimize warping of a cross section by cutting a single ingot immersed in the slurry bath which is filled with slurry. CONSTITUTION: A slurry bath(100) includes a hollow part(110) with an upper side which is open. A top end(127) of a front side(120) of the slurry bath is higher than top ends(137) of both sidewalls(130). An opening part(122) is formed on the front side of the slurry bath. An opening and closing member(124) opens or closes the opening part of the slurry bath. The opening and closing member is a slide type opening and closing member which vertically moves on the front side of the slurry bath.
申请公布号 KR101249860(B1) 申请公布日期 2013.04.03
申请号 KR20110090288 申请日期 2011.09.06
申请人 发明人
分类号 H01L21/301 主分类号 H01L21/301
代理机构 代理人
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