| 发明名称 |
COOLED CHARGED PARTICLE SYSTEMS AND METHODS |
| 摘要 |
<p>Cooled charged particle sources and methods are disclosed. In some embodiments, a charged particle source is thermally coupled to a solid cryogen, such as solid nitrogen. The thermal coupling can be design to provide good thermal conductivity to maintain the charged particle source at a desirably low temperature.</p> |
| 申请公布号 |
EP2443644(B1) |
申请公布日期 |
2013.04.03 |
| 申请号 |
EP20100742622 |
申请日期 |
2010.06.14 |
| 申请人 |
CARL ZEISS NTS, LLC. |
发明人 |
COMUNALE, RICHARD;BARRISS, LOUISE;MCVEY, SHAWN;DIMANNA, MARK D.;GROHOLSKI, ALEXANDER;SANFORD, COLIN A.;BASSETT, BRIAN M.;NOTTE IV, JOHN A. |
| 分类号 |
H01J37/08;H01J37/02;H01J37/28 |
主分类号 |
H01J37/08 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
