TRANSFER ROBOT AND SUBSTRATE PROCESSING APPARATUS

摘要

PURPOSE: A transfer robot and a substrate processing apparatus are provided to increase an access range in a height direction of an arm part including a hand and to reduce a size of the transfer robot. CONSTITUTION: An arm part(12) includes a hand(11) to maintain an object(5). A frame part(13) rotatably supports the arm part in a horizontal direction and is installed in a preset installation frame(23). An attaching unit(8) attaches the frame part to the installation frame. A lifting device(7) lifts the arm part on the upper side of the frame part within a preset lifting range. The lifting device includes a lifting member(72) and a pair of linear guides(73) to guide a lifting operation of the lifting member.