Array of microcavity plasma devices with microcavities having curved sidewalls and method of forming such array,申请号EP20080841926-传众专利搜索

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发明名称	Array of microcavity plasma devices with microcavities having curved sidewalls and method of forming such array
摘要
申请公布号	EP2203940(B1)	申请公布日期	2013.04.03
申请号	EP20080841926	申请日期	2008.10.27
申请人	THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS	发明人	EDEN, J., GARY;PARK, SUNG-JIN;KWANG-SOO, KIM;PRICE, ANDREW, J.
分类号	H01J61/82;C25D11/12;C25D11/26;H01J9/24;H01J11/18;H01J17/49	主分类号	H01J61/82
代理机构		代理人
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