| 摘要 |
PURPOSE: A MoTi target material and a method for manufacturing the same are provided to control electric resistance to be low and to solve a problem of the delamination of a membrane by reducing membrane stress. CONSTITUTION: A MoTi target material comprises 20-80 atom% of Ti and the rest of Mo and inevitable impurities. Hydrogen, which is one of the inevitable impurities, is 10 mass ppm or less. A method for manufacturing the MoTi target material includes a step for thermally treating the MoTi target material under conditions, a pressure below 100Pa, a temperature of 800>= or higher, and a period of 0.5 hour or longer. [Reference numerals] (AA,CC) Specimen No.; (BB,DD) Heat-treatment condition; (EE) 1400°C 20 hours; (FF) No heat-treatment; (GG) 1000°C 5 hours; (HH) 1000°C 10 hours; (II) 1150°C 5 hours; (JJ) 1150°C 10 hours;
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