发明名称 |
Test apparatus of semiconductor device and method thereof |
摘要 |
A test apparatus according to the present invention includes a probe card recognition unit that recognizes positions of at least two probe card marks formed to a probe card and assumes a probe card mark connection line connecting the positions of the probe card marks, a backing material recognition unit that recognizes positions of at least two backing material marks formed to a backing material where a semiconductor chip is fixed thereto and assumes a backing material mark connection line connecting the positions of the backing material mark, a positional relationship recognition unit that recognizes a positional relationship between the probe card and the backing material according to the probe card mark connection line and the backing material mark connection line, and a correction unit that corrects the position of at least one of the probe card and the backing material according to the positional relationship. |
申请公布号 |
US8410803(B2) |
申请公布日期 |
2013.04.02 |
申请号 |
US20100820623 |
申请日期 |
2010.06.22 |
申请人 |
SAWA NOBUHIRO;MINAMI KOUICHI;CHIBA MASATO;RENESAS ELECTRONICS CORPORATION;KABUSHIKI KAISHA NIHON MICRONICS |
发明人 |
SAWA NOBUHIRO;MINAMI KOUICHI;CHIBA MASATO |
分类号 |
G01R31/00;G01R31/20 |
主分类号 |
G01R31/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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