发明名称 Mass spectrometer
摘要 A cathode configuration for emission of electrons has a reaction zone connected to an entrance opening for the supply of neutral particles. The opening communicates with the cathode configuration for the ionization of the neutral particles and an ion extraction system communicates with the reaction zone. Ions from the extraction system are sent to a detection system and a mechanism for the evacuation of the mass spectrometer arrangement. The cathode configuration includes a field emission cathode with an emitter surface, wherein at a short distance from this emitter surface, an extraction grid is disposed for the extraction of electrons, which grid substantially covers the emitter surface. The emitter surface encompasses herein at least partially a hollow volume such that a tubular structure is formed.
申请公布号 US8410433(B2) 申请公布日期 2013.04.02
申请号 US201113205925 申请日期 2011.08.09
申请人 WUEST MARTIN;KNAPP WOLFRAM;INFICON GMBH 发明人 WUEST MARTIN;KNAPP WOLFRAM
分类号 H01J49/26;G21K5/04 主分类号 H01J49/26
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